Surface micromachined tuneable interferometer array K Aratani, PJ French, PM Sarro, D Poenar, RF Wolffenbuttel, ... Sensors and Actuators A: Physical 43 (1-3), 17-23, 1994 | 299 | 1994 |
Piezoresistance in polysilicon and its applications to strain gauges PJ French, AGR Evans Solid-State Electronics 32 (1), 1-10, 1989 | 245 | 1989 |
Optimization of a low-stress silicon nitride process for surface-micromachining applications PJ French, PM Sarro, R Mallée, EJM Fakkeldij, RF Wolffenbuttel Sensors and Actuators A: physical 58 (2), 149-157, 1997 | 242 | 1997 |
Polysilicon: a versatile material for microsystems PJ French Sensors and actuators A: Physical 99 (1-2), 3-12, 2002 | 238 | 2002 |
Modified Reynolds' equation and analytical analysis of squeeze-film air damping of perforated structures M Bao, H Yang, Y Sun, PJ French Journal of Micromechanics and Microengineering 13 (6), 795, 2003 | 202 | 2003 |
Characterizing size-dependent effective elastic modulus of silicon nanocantilevers using electrostatic pull-in instability H Sadeghian, CK Yang, JFL Goosen, E Van Der Drift, A Bossche, ... Applied Physics Letters 94 (22), 2009 | 171 | 2009 |
Comparison of techniques for measuring both compressive and tensile stress in thin films BP Van Drieënhuizen, JFL Goosen, PJ French, RF Wolffenbuttel Sensors and Actuators A: Physical 37, 756-765, 1993 | 168 | 1993 |
Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications EJ Connolly, GM O’Halloran, HTM Pham, PM Sarro, PJ French Sensors and Actuators A: Physical 99 (1-2), 25-30, 2002 | 164 | 2002 |
Polyimide sacrificial layer and novel materials for post-processing surface micromachining A Bagolini, L Pakula, TLM Scholtes, HTM Pham, PJ French, PM Sarro Journal of Micromechanics and Microengineering 12 (4), 385, 2002 | 138 | 2002 |
Sensors with digital or frequency output S Middelhoek, PJ French, JH Huijsing, WJ Lian Sensors and actuators 15 (2), 119-133, 1988 | 132 | 1988 |
Polycrystalline silicon strain sensors PJ French, AGR Evans Sensors and actuators 8 (3), 219-225, 1985 | 122 | 1985 |
Galvanic porous silicon formation without external contacts CMA Ashruf, PJ French, P Bressers, JJ Kelly Sensors and Actuators A: Physical 74 (1-3), 118-122, 1999 | 115 | 1999 |
Development of surface micromachining techniques compatible with on-chip electronics PJ French Journal of Micromechanics and Microengineering 6 (2), 197, 1996 | 113 | 1996 |
Galvanic cell formation in silicon/metal contacts: The effect on silicon surface morphology XH Xia, CMA Ashruf, PJ French, JJ Kelly Chemistry of materials 12 (6), 1671-1678, 2000 | 108 | 2000 |
A porous SiC ammonia sensor EJ Connolly, B Timmer, HTM Pham, J Groeneweg, PM Sarro, W Olthuis, ... Sensors and Actuators B: Chemical 109 (1), 44-46, 2005 | 104 | 2005 |
Precision in harsh environments P French, G Krijnen, F Roozeboom Microsystems & nanoengineering 2 (1), 1-12, 2016 | 103 | 2016 |
Fabrication of a CMOS compatible pressure sensor for harsh environments LS Pakula, H Yang, HTM Pham, PJ French, PM Sarro Journal of Micromechanics and Microengineering 14 (11), 1478, 2004 | 101 | 2004 |
The piezojunction effect in silicon sensors and circuits and its relation to piezoresistance JF Creemer, F Fruett, GCM Meijer, PJ French IEEE sensors journal 1 (2), 98, 2001 | 97 | 2001 |
Sensors for catheter applications PJ French, D Tanase, JFL Goosen Sensors Update 13 (1), 107-153, 2003 | 95 | 2003 |
Effects of size and defects on the elasticity of silicon nanocantilevers H Sadeghian, CK Yang, JFL Goosen, A Bossche, U Staufer, PJ French, ... Journal of Micromechanics and Microengineering 20 (6), 064012, 2010 | 94 | 2010 |