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S.V. Babu
S.V. Babu
Verified email at clarkson.edu
Title
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Cited by
Year
Mapping the world’s free-flowing rivers
G Grill, B Lehner, M Thieme, B Geenen, D Tickner, F Antonelli, S Babu, ...
Nature 569 (7755), 215-221, 2019
15442019
Solid State Sci
J Ecs
Technol 2, P311, 2013
3292013
Quasiparticle interaction in liquid 3He
S Babu, GE Brown
Annals of Physics 78 (1), 1-38, 1973
3111973
Excimer laser etching of polymers
V Srinivasan, MA Smrtic, SV Babu
Journal of applied physics 59 (11), 3861-3867, 1986
2991986
Modification of the Preston equation for the chemical–mechanical polishing of copper
Q Luo, S Ramarajan, SV Babu
Thin solid films 335 (1-2), 160-167, 1998
2401998
Metallized Plastics
KL Mittal, JR Susko
Electrochemical Society Symposium on Metallized Plastics, 2001
2312001
Advances in chemical mechanical planarization (CMP)
B Suryadevara
Woodhead Publishing, 2016
1852016
Hydroxyl Radical Formation in H 2 O 2‐Amino Acid Mixtures and Chemical Mechanical Polishing of Copper
M Hariharaputhiran, J Zhang, S Ramarajan, JJ Keleher, Y Li, SV Babu
Journal of the Electrochemical Society 147 (10), 3820, 2000
1712000
Chemical mechanical polishing of thermal oxide films using silica particles coated with ceria
SH Lee, Z Lu, SV Babu, E Matijević
Journal of materials Research 17 (10), 2744-2749, 2002
1592002
Chemical–mechanical polishing of copper in alkaline media
Q Luo, DR Campbell, SV Babu
Thin Solid Films 311 (1-2), 177-182, 1997
1521997
Colloid aspects of chemical–mechanical planarization
E Matijević, SV Babu
Journal of colloid and interface science 320 (1), 219-237, 2008
1192008
Effect of pH on CMP of copper and tantalum
A Jindal, SV Babu
Journal of the Electrochemical Society 151 (10), G709, 2004
1172004
Copper dissolution in aqueous ammonia-containing media during chemical mechanical polishing
Q Luo, RA Mackay, SV Babu
Chemistry of materials 9 (10), 2101-2106, 1997
1171997
Achievement of high planarization efficiency in CMP of copper at a reduced down pressure
S Pandija, D Roy, SV Babu
Microelectronic Engineering 86 (3), 367-373, 2009
1002009
Shallow trench isolation chemical mechanical planarization: a review
R Srinivasan, PVR Dandu, SV Babu
ECS Journal of Solid State Science and Technology 4 (11), P5029, 2015
992015
Cobalt polishing with reduced galvanic corrosion at copper/cobalt interface using hydrogen peroxide as an oxidizer in colloidal silica-based slurries
BC Peethala, HP Amanapu, URK Lagudu, SV Babu
Journal of The Electrochemical Society 159 (6), H582, 2012
992012
Relative roles of H 2 O 2 and glycine in CMP of copper studied with impedance spectroscopy
J Lu, JE Garland, CM Pettit, SV Babu, D Roy
Journal of the Electrochemical Society 151 (10), G717, 2004
992004
Stabilization of Alumina Slurry for Chemical− Mechanical Polishing of Copper
Q Luo, DR Campbell, SV Babu
Langmuir 12 (15), 3563-3566, 1996
971996
Chemical mechanical polishing using mixed abrasive slurries
A Jindal, S Hegde, SV Babu
Electrochemical and Solid-State Letters 5 (7), G48, 2002
962002
Synergistic roles of dodecyl sulfate and benzotriazole in enhancing the efficiency of CMP of copper
Y Hong, VK Devarapalli, D Roy, SV Babu
Journal of the Electrochemical Society 154 (6), H444, 2007
942007
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