| A high-bandwidth MEMS nanopositioner for on-chip AFM: Design, characterization, and control M Maroufi, A Bazaei, SOR Moheimani IEEE Transactions on Control Systems Technology 23 (2), 504-512, 2014 | 49 | 2014 |
| A 2DOF SOI-MEMS Nanopositioner with Tilted Flexure Bulk Piezoresistive Displacement Sensors M Maroufi, SO Moheimani IEEE Sensors Journal 16, 1908-1917, 2016 | 36 | 2016 |
| On-chip dynamic mode atomic force microscopy: A silicon-on-insulator MEMS approach MG Ruppert, AG Fowler, M Maroufi, SOR Moheimani Journal of Microelectromechanical Systems 26 (1), 215-225, 2016 | 35 | 2016 |
| Internal Model Control for Spiral Trajectory Tracking With MEMS AFM Scanners A Bazaei, M Maroufi, AG Fowler, SOR Moheimani IEEE Transactions on Control Systems Technology, 2016 | 35 | 2016 |
| High-stroke silicon-on-insulator MEMS nanopositioner: Control design for non-raster scan atomic force microscopy M Maroufi, AG Fowler, A Bazaei, SOR Moheimani Review of Scientific Instruments 86 (2), 023705, 2015 | 34 | 2015 |
| Compressibility Behaviour of Warp Knitted Spacer Fabrics Based on Elastic Curved Bar Theory F Mokhtari, M Shamshirsaz, M Latifi, M Maroufi Journal of Engineered Fibers and Fabrics 6 (4), 23-33, 2011 | 33 | 2011 |
| MEMS for Nanopositioning: Design and Applications M Maroufi, A Fowler, SOR Moheimani Journal of Microelectromechanical Systems, 1 - 32, 2017 | 32 | 2017 |
| Optimal design analysis of electrothermally driven microactuators SM Karbasi, M Shamshirsaz, M Naraghi, M Maroufi Microsystem technologies 16, 1065-1071, 2010 | 31 | 2010 |
| An adjustable-stiffness MEMS force sensor: Design, characterization, and control M Maroufi, H Alemansour, MB Coskun, SOR Moheimani Mechatronics 56, 198-210, 2018 | 28 | 2018 |
| On-chip feedthrough cancellation methods for microfabricated AFM cantilevers with integrated piezoelectric transducers MB Coskun, AG Fowler, M Maroufi, SOR Moheimani Journal of Microelectromechanical Systems 26 (6), 1287-1297, 2017 | 25 | 2017 |
| Displacement sensing with silicon flexures in MEMS nanopositioners A Bazaei, M Maroufi, A Mohammadi, SOR Moheimani Journal of microelectromechanical systems 23 (3), 502-504, 2014 | 25 | 2014 |
| Design, fabrication and characterization of a high-bandwidth 2DOF MEMS nanopositioner M Maroufi, SOR Moheimani 2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics …, 2013 | 22 | 2013 |
| Video-rate non-raster AFM imaging with cycloid trajectory N Nikooienejad, A Alipour, M Maroufi, SOR Moheimani IEEE Transactions on Control Systems Technology 28 (2), 436-447, 2018 | 21 | 2018 |
| Control of an Active AFM Cantilever With Differential Sensing Configuration MB Coskun, H Alemansour, AG Fowler, M Maroufi, SOR Moheimani IEEE Transactions on Control Systems Technology 27 (5), 2271-2278, 2018 | 21 | 2018 |
| Tilted beam piezoresistive displacement sensor: Design, modeling, and characterization M Maroufi, A Bazaei, A Mohammadi, SOR Moheimani Journal of Microelectromechanical Systems 24 (5), 1594-1605, 2015 | 21 | 2015 |
| Iterative learning control for video-rate atomic force microscopy N Nikooienejad, M Maroufi, SOR Moheimani IEEE/ASME Transactions on Mechatronics 26 (4), 2127-2138, 2020 | 15 | 2020 |
| Rosette-scan video-rate atomic force microscopy: Trajectory patterning and control design N Nikooienejad, M Maroufi, SOR Moheimani Review of Scientific Instruments 90 (7), 073702, 2019 | 14 | 2019 |
| Size effect on performance of resonant piezoelectric millimeter-sized cantilevers using as liquid level detection sensors M Maroufi, M Shamshirsaz 2012 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, 42-46, 2012 | 13 | 2012 |
| Tracking control of constant-linear-velocity spiral reference by LQG method A Bazaei, M Maroufi, SOR Moheimani IFAC-PapersOnLine 50 (1), 15568-15573, 2017 | 11 | 2017 |
| Kalman filter enabled high-speed control of a MEMS nanopositioner MG Ruppert, M Maroufi, A Bazaei, SOR Moheimani IFAC-PapersOnLine 50 (1), 15554-15560, 2017 | 11 | 2017 |
Reza MoheimaniProfessor & James Von Ehr Distinguished Chair, Dept of Mechanical Engineering, UT-DallasVerified email at utdallas.edu
