Prediction of polishing pressure distribution in CMP process with airbag type wafer carrier N Suzuki, Y Hashimoto, H Yasuda, S Yamaki, Y Mochizuki CIRP annals 66 (1), 329-332, 2017 | 37 | 2017 |
Study on the effectiveness of Extreme Cold Mist MQL system on turning process of stainless steel AISI 316 AS Jamaludin, A Hosokawa, T Furumoto, T Koyano, Y Hashimoto IOP Conference Series: Materials Science and Engineering 319 (1), 012054, 2018 | 26 | 2018 |
Evaluation of the minimum quantity lubrication in orthogonal cutting with the application of finite element method AS Jamaludin, A Hosokawa, T Furumoto, T Koyano, Y Hashimoto Int J Mechan Mechatron Eng IJMME-IJENS 17 (01), 104-109, 2017 | 26 | 2017 |
Fundamental investigation of gyro finishing experimental investigation of contact force between cylindrical workpiece and abrasive media under dry condition Y Hashimoto, T Ito, Y Nakayama, T Furumoto, A Hosokawa Precision Engineering 67, 123-136, 2021 | 25 | 2021 |
Analytical prediction of contact stiffness and friction damping in bolted connection E Shamoto, Y Hashimoto, M Shinagawa, B Sencer CIRP Annals 63 (1), 353-356, 2014 | 24 | 2014 |
High precision estimation on physical behavior for cutting with various tool rake angle by finite element method AS Jamaludin, H Akira, T Furumoto, T Koyano, Y Hashimoto Intelligent Manufacturing & Mechatronics: Proceedings of Symposium, 29 …, 2018 | 19 | 2018 |
Temperature measurement of wire electrode in wire EDM by two-color pyrometer T Koyano, T Takahashi, S Tsurutani, A Hosokawa, T Furumoto, ... Procedia CIRP 68, 96-99, 2018 | 15 | 2018 |
Development of highly accurate simulation model of wafer behavior considering contact between wafer and carrier during double-sided lapping Y HASHIMOTO, R KONDO, T FURUMOTO, A HOSOKAWA 精密工学会誌 (Web) 83 (5), 433-438, 2017 | 15 | 2017 |
Development an identification method of friction coefficient between wafer and carrier in double-sided lapping Y Hashimoto, T Sano, T Furumoto, A Hosokawa Precision Engineering 56, 364-369, 2019 | 14 | 2019 |
CO2 laser cleavage of chemically strengthened glass T Furumoto, Y Hashimoto, H Ogi, T Kawabe, M Yamaguchi, T Koyano, ... Journal of Materials Processing Technology 289, 116961, 2021 | 10 | 2021 |
Formation mechanism of pores inside structure fabricated by metal-based additive manufacturing K Egashira, T Furumoto, K Hishida, S Abe, T Koyano, Y Hashimoto, ... International Journal of Automation Technology 13 (3), 330-337, 2019 | 10 | 2019 |
Internal face finishing for a cooling channel using a fluid containing free abrasive grains M Yamaguchi, T Furumoto, S Inagaki, M Tsuji, Y Ochiai, Y Hashimoto, ... The International Journal of Advanced Manufacturing Technology 114, 497-507, 2021 | 8 | 2021 |
Material removal efficiency improvement by orientation control of CMP pad surface asperities N Suzuki, H Misono, E Shamoto, Y Hashimoto, H Yasuda, Y Mochizuki Precision Engineering 62, 83-88, 2020 | 8 | 2020 |
A calculation method for workpiece profile variation during double-sided lapping by considering workpiece elastic deformation Y Hashimoto, R Ozaki, T Furumoto, A Hosokawa Precision Engineering 73, 457-469, 2022 | 7 | 2022 |
Estimation of material removal rate distribution in double-sided polishing of thick square workpiece considering workpiece attitude Y Hashimoto, T Sano, T Furumoto, A Hosokawa Journal of Advanced Mechanical Design, Systems, and Manufacturing 13 (1 …, 2019 | 7 | 2019 |
Turning of difficult-to-machine materials with an actively driven rotary tool (ADRT)—Proposition of reciprocating turning contingent on fundamental cutting characteristics— A Hosokawa, H Yoshimatsu, T Koyano, T Furumoto, Y Hashimoto Journal of Advanced Mechanical Design, Systems, and Manufacturing 12 (5 …, 2018 | 7 | 2018 |
Elasto Hydrodynamic lubrication analysis of CMP process with consideration of micro asperity contact of polishing pad Y Hashimoto, N Suzuki, M Asaba, R Hino, E Shamoto Journal of the Japan Society for Precision Engineering 79 (1), 73-80, 2013 | 7 | 2013 |
Thermal stress cleavage of a single-crystal round sapphire bar by carbon dioxide laser T Furumoto, R Saito, K Watanabe, Y Ochi, Y Hashimoto, M Yamaguchi, ... Journal of Materials Processing Technology 297, 117237, 2021 | 6 | 2021 |
Tool failure mechanism in high-speed milling of Inconel 718 by use of ceramic tools N Suzuki, R Enmei, Y Hashimoto, E Shamoto, Y Hatano International Journal of Automation Technology 8 (6), 837-846, 2014 | 6 | 2014 |
Identification of nonlinear viscoelasticity of polishing pad using an on-machine compression tester N Suzuki, M Asaba, Y Hashimoto, E Shamoto ICPT 2012-International Conference on Planarization/CMP Technology, 1-5, 2012 | 6 | 2012 |